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"Modeling and Distributed Control of an Electrostatically Actuated ..."
Azeem Sarwar, Petros G. Voulgaris, Srinivasa M. Salapaka (2007)
- Azeem Sarwar, Petros G. Voulgaris, Srinivasa M. Salapaka:
Modeling and Distributed Control of an Electrostatically Actuated Microcantilever Array. ACC 2007: 4240-4245
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