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"Atomic force microscopy using voice coil actuators for vibration isolation."

Shingo Ito et al. (2015)

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DOI: 10.1109/AIM.2015.7222578

access: closed

type: Conference or Workshop Paper

metadata version: 2021-04-09

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  dblp key:
  - conf/aimech/ItoNPSS15
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  - https://dblp.org/rec/conf/aimech/ItoNPSS15
Shingo Ito, Daniel Neyer, Stefan Pirker, Jürgen Steininger, Georg Schitter:
Atomic force microscopy using voice coil actuators for vibration isolation. AIM 2015: 470-475

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