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"Parameter identification for nanopositioning of a 6-axis maglev stage with ..."

Vu Huy Nguyen, Won-jong Kim (2016)

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DOI: 10.1109/AIM.2016.7576843

access: closed

type: Conference or Workshop Paper

metadata version: 2018-01-10

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Vu Huy Nguyen, Won-jong Kim:
Parameter identification for nanopositioning of a 6-axis maglev stage with moving Lorentz coils. AIM 2016: 657-662

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