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"Multivariable predictive control of thin film deposition using a ..."

Dong Ni, Panagiotis D. Christofides (2005)

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DOI: 10.1109/ACC.2005.1470447

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-07

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Dong Ni, Panagiotis D. Christofides:
Multivariable predictive control of thin film deposition using a stochastic PDE model. ACC 2005: 3096-3101

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