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"Robust control of an electrostatically actuated MEMS in the presence of ..."

Guchuan Zhu, Julien Penet, Lahcen Saydy (2006)

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DOI: 10.1109/ACC.2006.1656386

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-04

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Guchuan Zhu, Julien Penet, Lahcen Saydy:
Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties. ACC 2006

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