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"Development of MEMS Capacitive Mirror Structure with CMOS Compatible Process."

Wei Liu et al. (2021)

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DOI: 10.1109/ASICON52560.2021.9620200

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-22

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  dblp key:
  - conf/asicon/LiuLHZQY21
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  - https://dblp.org/rec/conf/asicon/LiuLHZQY21
Wei Liu, Gang Liu, Bing He, Jie Zhang, Hanlin Qin, Shuai Yuan:
Development of MEMS Capacitive Mirror Structure with CMOS Compatible Process. ASICON 2021: 1-3

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