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"Optimization of Protective Layer Process for Micro-bridge Structure based ..."

Bo Zhang, Xiaoxu Kang, Xiaolan Zhong (2021)

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DOI: 10.1109/ASICON52560.2021.9620462

access: closed

type: Conference or Workshop Paper

metadata version: 2021-12-06

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Bo Zhang, Xiaoxu Kang, Xiaolan Zhong:
Optimization of Protective Layer Process for Micro-bridge Structure based MEMS/Sensors Application. ASICON 2021: 1-4

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