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"MEMS Comb-Actuator Resonance Measurement Method Using the 2nd Harmonics of ..."

Yoshikazu Takahashi (2001)

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DOI: 10.1109/ATS.2001.990305

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Yoshikazu Takahashi:
MEMS Comb-Actuator Resonance Measurement Method Using the 2nd Harmonics of the GND Current. Asian Test Symposium 2001: 333-337

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