"Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer ..."

FaJun Yang et al. (2018)

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DOI: 10.1109/COASE.2018.8560461

access: closed

type: Conference or Workshop Paper

metadata version: 2021-12-22

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FaJun Yang, Naiqi Wu, Rong Su, Yan Qiao:
Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations. CASE 2018: 241-246

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