"Characterizing and resolving unobservability in run-to-run control of high ..."

Farshad Harirchi et al. (2013)

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DOI: 10.1109/CDC.2013.6761002

access: closed

type: Conference or Workshop Paper

metadata version: 2020-08-04

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Farshad Harirchi, Tyrone Vincent, Anand Subramanian, Kameshwar Poolla, Broc Stirton:
Characterizing and resolving unobservability in run-to-run control of high mix semiconductor manufacturing. CDC 2013: 7022-7027

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