"An automated micro measurement system for integrated circuit masks."

F. R. Ashley, E. B. Murphy, H. J. Savard (1970)

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DOI: 10.1145/800160.805108

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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F. R. Ashley, E. B. Murphy, H. J. Savard:
An automated micro measurement system for integrated circuit masks. DAC 1970: 17-27

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