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"Layout aware line-edge roughness modeling and poly optimization for ..."

Yongchan Ban, Jae-Seok Yang (2011)

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DOI: 10.1145/2024724.2024828

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Yongchan Ban, Jae-Seok Yang:
Layout aware line-edge roughness modeling and poly optimization for leakage minimization. DAC 2011: 447-452

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