"Efficient Bilevel Source Mask Optimization."

Guojin Chen et al. (2024)

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DOI: 10.1145/3649329.3656252

access: closed

type: Conference or Workshop Paper

metadata version: 2024-11-30

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Guojin Chen, Hongquan He, Peng Xu, Hao Geng, Bei Yu:
Efficient Bilevel Source Mask Optimization. DAC 2024: 142:1-142:6

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