"Stitch-aware routing for multiple e-beam lithography."

Shao-Yun Fang, Iou-Jen Liu, Yao-Wen Chang (2013)

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DOI: 10.1145/2463209.2488765

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Shao-Yun Fang, Iou-Jen Liu, Yao-Wen Chang:
Stitch-aware routing for multiple e-beam lithography. DAC 2013: 25:1-25:6

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