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"Redundant via insertion for multiple-patterning directed-self-assembly ..."

Seongbo Shim, Woohyun Chung, Youngsoo Shin (2016)

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DOI: 10.1145/2897937.2898080

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Seongbo Shim, Woohyun Chung, Youngsoo Shin:
Redundant via insertion for multiple-patterning directed-self-assembly lithography. DAC 2016: 41:1-41:6

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