"A robust approach for process variation aware mask optimization."

Jian Kuang, Wing-Kai Chow, Evangeline F. Y. Young (2015)

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type: Conference or Workshop Paper

metadata version: 2021-08-09

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Jian Kuang, Wing-Kai Chow, Evangeline F. Y. Young:
A robust approach for process variation aware mask optimization. DATE 2015: 1591-1594

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