"Material Fatigue and Reliability of MEMS Accelerometers."

Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone (2008)

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DOI: 10.1109/DFT.2008.37

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  - https://dblp.org/rec/conf/dft/XiongWJ08
Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone:
Material Fatigue and Reliability of MEMS Accelerometers. DFT 2008: 314-322

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