"The classification algorithm development of photomasks defects based on ..."

Yuliya Kozina, Nataliya Gulyaeva (2016)

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DOI: 10.1109/DSMP.2016.7583581

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-12

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Yuliya Kozina, Nataliya Gulyaeva:
The classification algorithm development of photomasks defects based on fuzzy logic. DSMP 2016: 373-376

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