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"Development of high-transmittance back-illuminated silicon-on-sapphire ..."

Alvin G. Stern (2012)

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DOI: 10.1117/12.908983

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-03

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Alvin G. Stern:
Development of high-transmittance back-illuminated silicon-on-sapphire substrates thinned below 25 micrometers and bonded to fused silica for high quantum efficiency and high resolution avalanche photodiode imaging arrays. Sensors, Cameras, and Systems for Industrial and Scientific Applications 2012: 82980K

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