"Yield prediction in semiconductor manufacturing using an AI-based ..."

Peter Stich et al. (2020)

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DOI: 10.1109/EIT48999.2020.9208250

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Peter Stich, Michael G. Wahl, Peter Czerner, Christian Weber, Madjid Fathi:
Yield prediction in semiconductor manufacturing using an AI-based cascading classification system. EIT 2020: 609-614

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