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"A low pull-in SU-8 based Capacitive Micromachined Ultrasonic Transducer ..."

Jose Joseph, Shiv Govind Singh, Siva Rama Krishna Vanjari (2014)

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DOI: 10.1109/EMBC.2014.6943861

access: closed

type: Conference or Workshop Paper

metadata version: 2020-05-30

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Jose Joseph, Shiv Govind Singh, Siva Rama Krishna Vanjari:
A low pull-in SU-8 based Capacitive Micromachined Ultrasonic Transducer for medical imaging applications. EMBC 2014: 1398-1401

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