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"Fabrication of SU-8 based Capacitive Micromachined Ultrasonic Transducer ..."

Jose Joseph, Shiv Govind Singh, Siva Rama Krishna Vanjari (2015)

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DOI: 10.1109/EMBC.2015.7318622

access: closed

type: Conference or Workshop Paper

metadata version: 2020-05-30

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Jose Joseph, Shiv Govind Singh, Siva Rama Krishna Vanjari:
Fabrication of SU-8 based Capacitive Micromachined Ultrasonic Transducer for low frequency therapeutic applications. EMBC 2015: 1365-1368

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