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"Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for ..."
Kambiz Nanbakhsh et al. (2020)
- Kambiz Nanbakhsh, Riina Ritasalo, Wouter A. Serdijn, Vasiliki Giagka
:
Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for Millimeter Sized Implants. EMBC 2020: 3436-3439
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