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"Non-monolithic fabrication of thin-film microelectrode arrays on PMUT ..."
Andrada I. Velea et al. (2023)
- Andrada I. Velea, Joshua Wilson, Astrid Gollhardt, Cyril Baby Karuthedath
, Abhilash S. Thanniyil, Vasiliki Giagka:
Non-monolithic fabrication of thin-film microelectrode arrays on PMUT transducers as a bimodal neuroscientific investigation tool. EMBC 2023: 1-4
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