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"Ultra-dense co-integration of FeFETs and CMOS logic enabling very-fine ..."

Evelyn T. Breyer et al. (2019)

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DOI: 10.1109/ESSDERC.2019.8901735

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-07

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Evelyn T. Breyer, Halid Mulaosmanovic, Jens Trommer, Thomas Melde, Stefan Dünkel, Martin Trentzsch, Sven Beyer, Thomas Mikolajick, Stefan Slesazeck:
Ultra-dense co-integration of FeFETs and CMOS logic enabling very-fine grained Logic-in-Memory. ESSDERC 2019: 118-121

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