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"CMOS compatible ALD high-k double slot grating couplers for on-chip ..."
Maziar M. Naiini et al. (2012)
- Maziar M. Naiini, Christoph Henkel, B. Gunnar Malm, Mikael Östling
:
CMOS compatible ALD high-k double slot grating couplers for on-chip optical interconnects. ESSDERC 2012: 93-96
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