"Isolation of nanowires made on bulk wafers by ground plane doping."

Romain Ritzenthaler et al. (2017)

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DOI: 10.1109/ESSDERC.2017.8066651

access: closed

type: Conference or Workshop Paper

metadata version: 2022-05-09

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Romain Ritzenthaler, Hans Mertens, An De Keersgieter, Jérôme Mitard, Dan Mocuta, N. Horiguchi:
Isolation of nanowires made on bulk wafers by ground plane doping. ESSDERC 2017: 300-303

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