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"A Rapid Prototyping of Real-Time Pattern Generator for Step-and-Scan ..."
Naoto Miyamoto et al. (2007)
- Naoto Miyamoto, Masahiko Shimakage, Tatsuo Morimoto, Kazuya Kadota, Shigetoshi Sugawa, Tadahiro Ohmi:
A Rapid Prototyping of Real-Time Pattern Generator for Step-and-Scan Lithography Using Digital Micromirror Device. FPT 2007: 305-308
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