"A Rapid Prototyping of Real-Time Pattern Generator for Step-and-Scan ..."

Naoto Miyamoto et al. (2007)

> Home

Details and statistics

DOI: 10.1109/FPT.2007.4439272

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-24

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/fpt/MiyamotoSMKSO07
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/fpt/MiyamotoSMKSO07
Naoto Miyamoto, Masahiko Shimakage, Tatsuo Morimoto, Kazuya Kadota, Shigetoshi Sugawa, Tadahiro Ohmi:
A Rapid Prototyping of Real-Time Pattern Generator for Step-and-Scan Lithography Using Digital Micromirror Device. FPT 2007: 305-308

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.