"A formula of STI cmp design rule."

Min-Chun Tsai (2008)

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DOI: 10.1145/1366110.1366117

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Min-Chun Tsai:
A formula of STI cmp design rule. ACM Great Lakes Symposium on VLSI 2008: 11-16

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