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"An Automatic Insertion Scheme of Extra Via for DSA-MP Hybrid Lithography."
Yuqin Wang et al. (2024)
- Yuqin Wang
, Cheng Guo
, Xiaojing Su
, Xin Hong
, Zixi Liu
, Xiaohuan Ling
, Bojie Ma
, Pengyu Ren
, Yujie Jiang
, Yajuan Su
, Yayi Wei
:
An Automatic Insertion Scheme of Extra Via for DSA-MP Hybrid Lithography. ACM Great Lakes Symposium on VLSI 2024: 520-524
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