"A MEMS-Based Piezoelectric Pump with a Low Frequency and High Flow."

Dehui Liu et al. (2020)

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DOI: 10.1007/978-3-030-70626-5_31

access: closed

type: Conference or Workshop Paper

metadata version: 2021-05-05

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Dehui Liu, Zhen Wang, Liang Huang, Shaojie Wu, Dandan Yuan:
A MEMS-Based Piezoelectric Pump with a Low Frequency and High Flow. HCC 2020: 295-301

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