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"An absolute angle recovery method for dual-interferometer-based rotational ..."

Pablo Serrano Gálvez, Mark Butcher, Alessandro Masi (2017)

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DOI: 10.1109/I2MTC.2017.7969798

access: closed

type: Conference or Workshop Paper

metadata version: 2022-02-01

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  dblp key:
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Pablo Serrano Gálvez, Mark Butcher, Alessandro Masi:
An absolute angle recovery method for dual-interferometer-based rotational stages. I2MTC 2017: 1-6

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