"Modeling FinFET metal gate stack resistance for 14nm node and beyond."

Kenichi Miyaguchi et al. (2015)

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DOI: 10.1109/ICICDT.2015.7165885

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Kenichi Miyaguchi, Bertrand Parvais, Lars-Åke Ragnarsson, Piet Wambacq, Praveen Raghavan, Abdelkarim Mercha, Anda Mocuta, Diederik Verkest, Aaron Thean:
Modeling FinFET metal gate stack resistance for 14nm node and beyond. ICICDT 2015: 1-4

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