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"A Sidewall Piezoresistive Force Sensor Used in a MEMS Gripper."
Tao Chen et al. (2008)
- Tao Chen, Liguo Chen, Lining Sun, Jiachou Wang, Xinxin Li:
A Sidewall Piezoresistive Force Sensor Used in a MEMS Gripper. ICIRA (2) 2008: 207-216
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