"High Precision Control for Nano-stage Driven by Magnetostrictive Actuator."

Xinkai Chen, Chun-Yi Su (2013)

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DOI: 10.1007/978-3-642-40849-6_66

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-07

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Xinkai Chen, Chun-Yi Su:
High Precision Control for Nano-stage Driven by Magnetostrictive Actuator. ICIRA (2) 2013: 666-677

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