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"MIMO Data-Driven Feedforward Tuning for the Ultra-precision Wafer Stage ..."

Weicai Huang, Kaiming Yang, Yu Zhu (2021)

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DOI: 10.1007/978-3-030-89098-8_34

access: closed

type: Conference or Workshop Paper

metadata version: 2021-11-03

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Weicai Huang, Kaiming Yang, Yu Zhu:
MIMO Data-Driven Feedforward Tuning for the Ultra-precision Wafer Stage Using Rational Basis Functions. ICIRA (2) 2021: 353-363

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