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"A Flexure-Based XY Precision Positioning Stage with Integrated ..."

Mingxiang Ling (2019)

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DOI: 10.1007/978-3-030-27526-6_25

access: closed

type: Conference or Workshop Paper

metadata version: 2019-08-02

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Mingxiang Ling:
A Flexure-Based XY Precision Positioning Stage with Integrated Displacement PVDF Sensor. ICIRA (1) 2019: 285-295

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