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"Switched self-sensing actuator for a MEMS nanopositioner."

Steven Ian Moore, Yuen Kuan Yong, S. O. Reza Moheimani (2017)

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DOI: 10.1109/ICMECH.2017.7921134

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-15

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  - https://dblp.org/rec/conf/icmech/MooreYM17
Steven Ian Moore, Yuen Kuan Yong, S. O. Reza Moheimani:
Switched self-sensing actuator for a MEMS nanopositioner. ICM 2017: 372-377

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