"Observer-Based Disturbance Suppression in a 3-DoF Positioning System for ..."

Daniel Pechgraber, Ernst Csencsics, Georg Schitter (2025)

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DOI: 10.1109/ICM62621.2025.10934889

access: closed

type: Conference or Workshop Paper

metadata version: 2025-05-06

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Daniel Pechgraber, Ernst Csencsics, Georg Schitter:
Observer-Based Disturbance Suppression in a 3-DoF Positioning System for High-Precision 3D Inline Metrology. ICM 2025: 1-6

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