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"Monolayer Surface Coatings Solve Stiction and Drift Problems in MEMS."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Xiaoyang Zhu (2003)

Dagstuhl

Trier

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DOI: 10.1109/ICMENS.2003.1221979

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Xiaoyang Zhu:
Monolayer Surface Coatings Solve Stiction and Drift Problems in MEMS. ICMENS 2003: 128-130

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last updated on 2023-03-24 00:03 CET by the dblp team

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