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"Closed-form solution for cycle time of revisiting processes in single-arm ..."

Yuxi Sun, Naiqi Wu, MengChu Zhou (2011)

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DOI: 10.1109/ICNSC.2011.5874923

access: closed

type: Conference or Workshop Paper

metadata version: 2022-02-14

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Yuxi Sun, Naiqi Wu, MengChu Zhou:
Closed-form solution for cycle time of revisiting processes in single-arm cluster tool scheduling with atomic layer deposition. ICNSC 2011: 377-382

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