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"Closed-Loop Control of a Base XY Stage with Rotational Degree-of-Freedom ..."
Hemant Melkote, Farshad Khorrami (1999)
- Hemant Melkote, Farshad Khorrami:
Closed-Loop Control of a Base XY Stage with Rotational Degree-of-Freedom for a High-Speed Ultra-Accurate Manufacturing System. ICRA 1999: 1812-1817
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