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"Modeling, Scheduling, and Prediction in Wafer Fabrication Systems Using ..."

Hung-We Wen, Li-Chen Fu, Shih-Shinh Huang (2001)

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DOI: 10.1109/ROBOT.2001.933169

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Hung-We Wen, Li-Chen Fu, Shih-Shinh Huang:
Modeling, Scheduling, and Prediction in Wafer Fabrication Systems Using Queueing Petri Net and Genetic Algorithm. ICRA 2001: 3559-3564

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