"Fabrication of a 940 nm RuS2 Photodetector via Post-Sulfurization of Ru ..."

Jaehyeok Kim et al. (2024)

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DOI: 10.1109/ICST62759.2024.10992192

access: closed

type: Conference or Workshop Paper

metadata version: 2025-11-15

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Jaehyeok Kim, Tatsuya Nakazawa, Donghyun Kim, Yohei Kotsugi, Seung-Min Chung, Soo-Hyun Kim, Hyungjun Kim:
Fabrication of a 940 nm RuS2 Photodetector via Post-Sulfurization of Ru Thin Film Grown by Atomic Layer Deposition. ICST 2024: 1-3

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