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"Trajectory tracking control for pneumatic actuated scan stage with time ..."
Wataru Ohnishi et al. (2016)
- Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Kazuaki Saiki:
Trajectory tracking control for pneumatic actuated scan stage with time delay compensation. IECON 2016: 5125-5130
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