"Design of Cantilever Diaphragm Array Piezoelectric MEMS Microphone for ..."

Yu-Chen Chen et al. (2019)

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DOI: 10.1109/SENSORS43011.2019.8956850

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Yu-Chen Chen, Sung-Cheng Lo, Hsu-Hsiang Cheng, Mingching Wu, I-Yu Huang, Weileun Fang:
Design of Cantilever Diaphragm Array Piezoelectric MEMS Microphone for Signal-To-Noise Ratio Enhancement. IEEE SENSORS 2019: 1-4

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