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"Ultrasensitive micromachined bulk acoustic wave resonators based vacuum ..."

Nishit Goel, Stephen Bart, Srinivas Tadigadapa (2017)

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DOI: 10.1109/ICSENS.2017.8234417

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-08

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Nishit Goel, Stephen Bart, Srinivas Tadigadapa:
Ultrasensitive micromachined bulk acoustic wave resonators based vacuum gauges and their optimization. IEEE SENSORS 2017: 1-3

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