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"Large-aperture Fabry-Perot filters based on silicon/silicon carbonitride ..."

Christian Huber, Benedikt Stein, Heinz Kalt (2017)

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DOI: 10.1109/ICSENS.2017.8233879

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-15

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Christian Huber, Benedikt Stein, Heinz Kalt:
Large-aperture Fabry-Perot filters based on silicon/silicon carbonitride distributed Bragg reflectors for the near-infrared. IEEE SENSORS 2017: 1-3

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