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"Fabrication of MEMS Accelerometer for Vibration Sensing in Gas Turbine."
S. Kalaiselvi, L. Sujatha, R. Sundar (2018)
- S. Kalaiselvi, L. Sujatha, R. Sundar:
Fabrication of MEMS Accelerometer for Vibration Sensing in Gas Turbine. IEEE SENSORS 2018: 1-4
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