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"A simple method for determining the coefficients of thermal expansion of ..."

Hai-Yun Liu (2016)

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DOI: 10.1109/ICSENS.2016.7808434

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-28

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Hai-Yun Liu:
A simple method for determining the coefficients of thermal expansion of polysilicon thin films by using resonance frequency measurements. IEEE SENSORS 2016: 1-3

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